针尖锐度 Silicon tip radius (rtip)

< 15 nm

长宽 Cantilever length, width (l/w)

l = 70...85 µm, w   = 30 µm

灵敏度 Sensitivity (s)

3 µV/nm

应用 Applications

AFM，纳米探测，结合SEM/TEM的力学探测

共振频率 Resonant frequency (fR)

500...1300 kHz

刚度 Stiffness (k)

35...400 N/m