针尖锐度 Silicon tip radius (rtip)

< 15 nm

长宽 Cantilever length, width (l/w)

l = 305 µm, w =   110 µm

灵敏度 Sensitivity (s)

1-2 µV/nm

应用 Applications

AFM，纳米探测，结合SEM/TEM的力学探测

PRSA-L300-F50-Si-PCB

共振频率 Resonant frequency (fR)

fR = 30~65 kHz

刚度 Stiffness (k)

k = 1~15 N/m

PRSA-L300-F80-Si-PCB

共振频率 Resonant frequency (fR)

65...95 kHz

刚度 Stiffness (k)

15...56 N